Microfabrication technology: Organized assembly of carbon nanotubes
Microfabrication technology: Organized assembly of carbon nanotubes
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DOI：
10.1038/416495a
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发表时间：
2002-04
期刊：
影响因子：
64.8
通讯作者：
B. Wei;R. Vajtai;Y. Jung;J. Ward;R. Zhang;G. Ramanath;P. Ajayan
中科院分区：
文献类型：
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作者：
B. Wei;R. Vajtai;Y. Jung;J. Ward;R. Zhang;G. Ramanath;P. Ajayan
为了建立集成的系统，纳米级的结构需要被安排成明确的配置。在这里，我们使用气相催化剂输送的化学气相沉积方法，将碳纳米管以各种预定的方向组装到硅/二氧化硅衬底上，将它们构建成一维、二维和三维排列。纳米管选择性地生长在二氧化硅表面并垂直于二氧化硅表面，这迫使它们继承了衬底的光刻加工模板形貌，从而允许成核位置和生长方向得到控制。
Nanoscale structures need to be arranged into well-defined configurations in order to build integrated systems. Here we use a chemical-vapour deposition method with gas-phase catalyst delivery to direct the assembly of carbon nanotubes in a variety of predetermined orientations onto silicon/silica substrates, building them into one-, two- and three-dimensional arrangements. The preference of nanotubes to grow selectively on and normal to silica surfaces forces them to inherit the lithographically machined template topography of their substrates, allowing the sites of nucleation and the direction of growth to be controlled.