Consideration of peeling-off of amorphous carbon film, from changes in chemical states of the film during its deposition
Consideration of peeling-off of amorphous carbon film, from changes in chemical states of the film during its deposition
复制标题
从沉积过程中薄膜化学状态的变化考虑非晶碳薄膜的剥离
DOI：
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发表时间：
2018
期刊：
影响因子：
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通讯作者：
T. Ohshima and H. Kawasaki
中科院分区：
文献类型：
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作者：
M. Shinohara;T. Ihara;Y. Yagyu;T. Ohshima and H. Kawasaki
