Superplastic Nanoforging of Pt-Based Metallic Glass with Dies of Zr-BMG and Glassy Carbon Fabricated by Focused Ion Beam
Superplastic Nanoforging of Pt-Based Metallic Glass with Dies of Zr-BMG and Glassy Carbon Fabricated by Focused Ion Beam
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DOI：
10.4028/www.scientific.net/msf.539-543.2088
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发表时间：
2007-02
期刊：
影响因子：
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通讯作者：
Y. Saotome;Suguru Okaniwa;H. Kimura;A. Inoue
中科院分区：
文献类型：
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作者：
Y. Saotome;Suguru Okaniwa;H. Kimura;A. Inoue
介绍了一种利用聚焦离子束(FIB)制作纳米模具，通过超塑性纳米锻造金属玻璃来制造纳米结构的技术。研究了玻璃炭和锆基金属玻璃的纤维加工特性，由于其各向同性的非晶态结构，可用于制造纳米级模具。利用该模具对Pt48.75Pd9.75Cu19.5P22金属玻璃进行了纳米级锻造。将薄箔样品在小炉子中加热，并在小真空室中压缩加载。模具，1μm直径的模锻微型齿轮，以及用于光学应用的800 nm和400 nm周期性纳米结构。我们观察了热膨胀和工作材料与模具材料之间的接触角对纳米成形性能的影响。金属玻璃作为纳米压印材料和FIB纳米加工模具材料具有很高的应用价值。
This paper introduces a technique for fabricating nano-structures through super plastic nano-forging of metallic glass using nano-scale dies that are fabricated by a focused-ion beam (FIB). FIB-machining characteristics of glassy carbon and Zr-based metallic glass have been studied and are useful for fabricating nano-scale dies because of the isotropic homogeneity of their amorphous structures. We used the dies to nano-forge Pt48.75Pd9.75Cu19.5P22 metallic glass. The thin foil specimens were heated in a small furnace and compressively loaded in a small vacuum chamber. Dies, a die-forged 1μm-diameter micro-gear, and both 800 and 400nm periodic nano-structures for optical applications were demonstrated. We observed the effects of thermal expansion and contact angle between the working material and the die materials on nano-formability. Metallic glasses are highly useful as materials for nano-imprinting and as die materials for FIB nano-machining.