Sub-micron resolution CT for failure analysis and process development
Sub-micron resolution CT for failure analysis and process development
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DOI：
10.1088/0957-0233/19/9/094001
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发表时间：
2008-09-01
影响因子：
2.4
通讯作者：
Yun, W.
中科院分区：
文献类型：
--
作者：
Feser, M.;Gelb, J.;Yun, W.
许多现代工业过程和研究应用对低原子序数低对比度样品的X射线计算机断层扫描（CT）成像分辨率和灵敏度提出了越来越高的要求。提高成像分辨率的三种方法是（1）减小X射线光斑尺寸，（2）使用更高分辨率的探测器或（3）采用X射线光学元件。采用这些方法中的一种或多种的系统是可用的，并且正在继续开发中。本文中描述的Xradia MicroXCT（TM）投影型显微镜通过采用与微焦点X射线源配对的高分辨率探测器，针对高分辨率X射线CT进行了优化。该CT系统中的大工作距离使得能够以微米分辨率对大样品（例如倒装芯片封装）进行完整的断层扫描数据收集。使用X射线光学元件作为聚光器光学元件和成像物镜的X射线CT仪器是能够达到亚50 nm分辨率的新发展。这些仪器有各种应用，包括半导体行业的芯片级成像以及燃料电池的工艺开发，我们在这里将其描述为一种应用。没有X射线光学元件的亚微米分辨率CT仪器已经有了很大的应用基础;然而，针对软材料和低对比度样品进行了优化的新仪器，如Xradia nanoXCT（TM），提供了全新的功能并开辟了新的应用。相衬成像领域的新发展为吸收率非常低的标本提供了前所未有的图像对比度，这对于研究应用来说，首次实现了许多标本在自然状态下的成像（例如，例如，在一个实施例中，检查钙化的动脉）。用于亚50 nm X射线CT的Zernike相位对比甚至能够实现用于生物或医学应用的单细胞或薄组织切片的成像。
Many modern industrial processes and research applications place increasingly higher demands on x-ray computed tomography (CT) imaging resolution and sensitivity for low-contrast specimens with a low atomic number. The three approaches to increasing imaging resolution are (1) reduction in the x-ray spot size, (2) use of higher resolution detectors or (3) employment of x-ray optical elements. Systems that pursue one or more of these approaches are available and under continued development. The Xradia MicroXCT (TM) projection-type microscope described in this paper has been optimized for high-resolution x-ray CT by employing a high-resolution detector paired with a microfocus x-ray source. Large working distances in this CT system enable full tomographic data collection at micrometre resolution of large samples, such as flip-chip packages. X-ray CT instruments using x-ray optical elements for condenser optics and imaging objective lenses are a new development capable of reaching sub-50 nm resolution. These instruments find various applications, including die-level imaging in the semiconductor industry as well as the process development for fuel cells, which we describe here as one application. Sub-micron resolution CT instruments without x-ray optical elements have a large application base already; however, new instruments optimized for soft materials and low-contrast specimens, such as the Xradia nanoXCT (TM), offer completely new capabilities and open new applications. New developments in the area of phase contrast imaging enable unprecedented image contrast for specimens with very low absorption, which for research applications enables for the first time the imaging of many specimens in their natural state (e. g., arteries to examine calcification). Zernike phase contrast for sub-50 nm x-ray CT even enables the imaging of single cell or thin tissue slices for biological or medical applications.