Failure of DLC Films Caused by Cyclic Sphere Indentation and Effects of Film Structures on Failure Mode
Failure of DLC Films Caused by Cyclic Sphere Indentation and Effects of Film Structures on Failure Mode
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循环球压痕引起的DLC薄膜失效及薄膜结构对失效模式的影响
DOI：
10.9773/sosei.60.203
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
Jyunpei Kobata
中科院分区：
文献类型：
--
作者：
M. Nakamura;Yuka Takagawa;Ryuki Yamazoe;Ken;Jyunpei Kobata
循环压痕试验是一种新的评价类金刚石（DLC）等硬质涂层强度的方法。然后，一个测试台被制造并用于DLC的评价。采用非平衡磁控溅射（UBM）方法在热处理和抛光的JISSCM 415基底上制备了类金刚石膜（DLC）和用于提高DLC结合强度的Cr/C倾斜过渡层。使用直径为10 mm的Si 3 N4球进行循环压痕试验。10000次循环压痕导致压痕中DLC断裂和脱落。在印模周围也观察到环形裂纹。I（D）/I（G）是D峰强度与G峰强度的比率，其朝向印模的中心减小。这被认为表明DLC中sp2簇尺寸减小。另一方面，压应力增加的DLC的表面附近的接触区域中，所示的G峰位置的变化。这似乎是造成印模中DLC断裂和脱落的原因。
As a new strength evaluation method for hard coatings such as diamond-like carbon (DLC), the cyclic indentation test was proposed. Then, a test rig was fabricated and used for the evaluation of DLC. DLC and a Cr/C inclined interlayer for the improvement of the adhesion strength of DLC were prepared by the unbalanced magnetron (UBM) sputtering method on heat-treated and polished JIS SCM415 substrates. Si3N4 spheres having diameters of 10 mm were used for the cyclic indentation test. 10000 cycle indentations brought about DLC fracture and detachment in the indentation impression. Also ring cracks were observed around the impression. I(D)/I(G), which is the ratio of the D to G peak intensities, decreases towards the center of the impression. It was considered to indicate decreasing sp2 cluster size in DLC. On the other hand, compressive stress increased near the surface of DLC in the contact area, as indicated by the change in its G peak position. It seemed to be the cause of the fracture and detachment of DLC in the impression.