Masato Aketagawa et al.: "Small length measurement using regular crystalline lattice for reference(3rd report)-suppress of thermal drift and extension of measurement range over micrometers-" Journal of the Japan Society of Precision Engineering/Seimitsu K
Masato Aketagawa et al.: "Small length measurement using regular crystalline lattice for reference(3rd report)-suppress of thermal drift and extension of measurement range over micrometers-" Journal of the Japan Society of Precision Engineering/Seimitsu K
复制标题
Masato Aketakawa等人:“参考使用规则晶格的小长度测量(第三次报告)-抑制热漂移和扩展微米级测量范围-”日本精密工程学会杂志/Seimitsu K
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: