Influence of hydrogen on the thermionic electron emission from nitrogen-incorporated polycrystalline diamond films
Influence of hydrogen on the thermionic electron emission from nitrogen-incorporated polycrystalline diamond films
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氢对掺氮多晶金刚石薄膜热电子发射的影响
DOI：
10.1116/1.3684982
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发表时间：
2012
期刊：
影响因子：
--
通讯作者：
J. Davidson
中科院分区：
文献类型：
--
作者：
W. Paxton;M. Howell;W. Kang;J. Davidson
虽然氢被证明可以提高含氮金刚石阴极的热电子发射性能，但当这些阴极被加热到超过700 °C时，这种影响就会减弱，这可能是因为氢从钻石中脱附。为了进一步研究这一行为，本工作研究了在氢-甲烷-氮等离子体中用化学气相沉积方法生长的含氮金刚石薄膜的热电子发射特性。在生长状态下和经过氢等离子体处理后，测试了薄膜在500到900 °C温度范围内的热刺激电子发射。发射电流增加，如理查森方程式所描述的热发射高达 ∼ 700 °C。在 ∼ 800 °C以上，观察到热离子发射电流减小，这一影响归因于从钻石中损失氢。通过将金刚石薄膜暴露在低能氢等离子体中，探索了氢效应的恢复。热离子..。
Although hydrogen has been shown to enhance the thermionic emission properties of nitrogen-incorporated diamond cathodes, the effect diminishes when these cathodes are heated to temperatures in excess of 700 °C, possibly due to the hydrogen desorbing from the diamond. In order to further examine this behavior, this work examines the thermionic emission properties of a nitrogen-incorporated diamond film grown by chemical vapor deposition in a hydrogen-methane-nitrogen plasma. The film was tested for thermally stimulated electron emission at temperatures ranging from 500 to 900 °C in an as-grown state and after exposure to a hydrogen plasma treatment. Emission current increased, as described by the Richardson equation for thermal emission up to ∼ 700 °C. Above ∼ 800 °C the thermionic emission current was observed to diminish, an effect attributed to the loss of hydrogen from the diamond. Recovery of the hydrogen effect was explored by exposing the diamond film to a low-energy hydrogen plasma. The thermionic...