Gas sensors based on MEMS structures made of ceramic ZrO2/Y2O3 material

Gas sensors based on MEMS structures made of ceramic ZrO2/Y2O3 material
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DOI：
10.1117/12.887500
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发表时间：
2011-05
期刊：
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影响因子：
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通讯作者：
A. Vasiliev;A. Lipilin;A. S. Lagutin;A. Pisliakov;N. P. Zaretskiy;N. Samotaev;A. Sokolov
A. Vasiliev;A. Lipilin;A. S. Lagutin;A. Pisliakov;N. P. Zaretskiy;N. Samotaev;A. Sokolov
中科院分区：
其他
文献类型：
--
作者：
A. Vasiliev;A. Lipilin;A. S. Lagutin;A. Pisliakov;N. P. Zaretskiy;N. Samotaev;A. Sokolov

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描述了基于氧化钇稳定的氧化锆（YSZ）和氧化铝膜的用于恶劣环境条件下的气体传感器的MEMS平台的制造方法。结果表明，这种膜的应用允许MEMS功耗在450°C下降低到约75 mW，在气体传感器的连续脉冲加热下降低到约1 mW。
The methods of the fabrication of MEMS platforms based on yttria stabilized zirconia (YSZ) and alumina membranes for gas sensors used in harsh environmental conditions are described. It is shown that the application of such membranes permits a decrease in MEMS power consumption at 450°C down to ~75 mW at continuous and down to ~ 1 mW at pulse heating of gas sensor.