Plastic and Elastic Properties of Compositionally Modulated Thin Films
Plastic and Elastic Properties of Compositionally Modulated Thin Films
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DOI：
10.1146/annurev.ms.24.080194.002405
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发表时间：
1994-08
期刊：
影响因子：
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通讯作者：
S. Barnett;M. Shinn
中科院分区：
文献类型：
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作者：
S. Barnett;M. Shinn
具有生长周期共位调制的薄膜的力学性能，通常被称为多层或超晶格，继续被积极地研究。早期的兴趣主要集中在弹性特性和“超模量”效应上，即在特定的成分调制波长上观察到异常大的弹性模量。虽然最近与超模结果相矛盾的实验证据抑制了对这一领域的兴趣，但在超晶格中观察到的较小弹性异常仍然相当活跃。在过去的几年里，人们对这些材料的强度和硬度越来越感兴趣，这不仅是由于科学问题，而且是由于在保护和摩擦学涂层领域可能的实际应用。最近的基本进展提高了对控制这些性质的机制的理解。多层材料的机械性能也引起了人们的普遍关注，因为这种结构在半导体、磁性和超导应用中得到了广泛的应用。最近的综述文章（1、2）相当详细地描述了这一领域的工作。因此，本综述所涉及的主题主要是
The mechanical properties of thin films with grown-in periodic com position modulations, usually referred to as multi layers or superlattices, continue to be actively investigated. Much of the early interest centered on elastic properties and the "supermodulus" effect, i.e. the observation of unusually large elastic moduli at specific composition-modulation wave lengths. While recent experimental evidence contradicting the supcr modulus results has dampened interest in this area, there is still con siderable activity concerning smaller elastic anomalies observed in superiattices. The interest in the strength and hardness of these materials has increased over the last several years, driven not only by scientific issues, but by possible practical applications in the area of protective and tribological coatings. Recent fundamental advances have improved the understanding of the mechanisms controlling these properties. Multilayer mechanical properties are also of general interest because of the wide use of such structures in semiconductor, magnetic, and superconducting applications. Recent review articles (I, 2) have described the work in this area in considerable detail. The topics covered in this review are thus primarily