An analytical model for pull-in voltage of clamped-clamped multilayer beams
An analytical model for pull-in voltage of clamped-clamped multilayer beams
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DOI：
10.1016/j.sna.2004.03.027
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发表时间：
2004-10-04
影响因子：
4.6
通讯作者：
Li, WH
中科院分区：
文献类型：
--
作者：
Rong, H;Huang, QA;Li, WH
本文用能量法建立了两端固支多层梁挠度随外加电压变化的解析模型。得到了梁中心的归一化位移和吸合电压，该模型也适用于两端固支的压应力梁。模型结果与有限元模拟，提供了CosolveEM模块在Coventorware，表现出良好的协议。这提供了一种提取多层梁材料特性的方法。(C)2004 Elsevier B.V.保留所有权利。
This paper develops an analytical model for the deflection of clamped-clamped multilayer beams as a function of applied voltage by the energy method. The normalized displacement of the center of the beams and the pull-in voltage have been obtained, the model is also suitable to clamped-clamped beams with compressive stress. The model results are compared with FEM simulations, provided by the CosolveEM module in Coventorware, showing excellent agreement. This provides an approach of extracting material properties for the multilayer beams. (C) 2004 Elsevier B.V. All rights reserved.