Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
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DOI：
10.1002/adom.201600250
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发表时间：
2016-11-01
影响因子：
9
通讯作者：
Tuennermann, Andreas
中科院分区：
文献类型：
--
作者：
Siefke, Thomas;Kroker, Stefanie;Tuennermann, Andreas
线栅偏振器（WGP），周期性纳米光学超颖表面，是许多光学应用中方便的偏振元件。然而，它们在深紫外光谱范围内仍然不足。结果表明，要实现高性能的紫外WGP的材料具有大的绝对值的复介电常数和消光系数在感兴趣的波长必须利用。这一要求相比，考虑带内和带间吸收过程的折射率模型。解释了为什么金属WGP在深紫外波段的消光比本质上很低，而宽带隙半导体在这个光谱范围内是上级材料候选者。为了证明这一点，二氧化钛WGP的设计，制造和光学特性。在193 nm的波长处，实现了前所未有的384的消光比和10%的透射率。
Wire grid polarizers (WGPs), periodic nano-optical metasurfaces, are convenient polarizing elements for many optical applications. However, they are still inadequate in the deep ultraviolet spectral range. It is shown that to achieve high performance ultraviolet WGPs a material with large absolute value of the complex permittivity and extinction coefficient at the wavelength of interest has to be utilized. This requirement is compared to refractive index models considering intraband and interband absorption processes. It is elucidated why the extinction ratio of metallic WGPs intrinsically humble in the deep ultraviolet, whereas wide bandgap semiconductors are superior material candidates in this spectral range. To demonstrate this, the design, fabrication, and optical characterization of a titanium dioxide WGP are presented. At a wavelength of 193 nm an unprecedented extinction ratio of 384 and a transmittance of 10% is achieved.