Dynamic performance analysis of a micro cantilever embedded in elastomer
Dynamic performance analysis of a micro cantilever embedded in elastomer
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DOI：
10.1088/0960-1317/25/7/075006
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发表时间：
2015-07-01
影响因子：
2.3
通讯作者：
Shimoyama, Isao
中科院分区：
文献类型：
--
作者：
Hosono, Minako;Noda, Kentaro;Shimoyama, Isao
本文研究了硅橡胶聚二甲基硅氧烷(PDMS)中的微硅悬臂梁的动态特性。这种组合结构由杨氏模数明显不同的材料组成，被用作剪切应变测量的触觉传感器。触觉传感器的频率响应在立式悬臂梁的固有频率附近没有共振，而在PDMS覆盖物的固有共振频率附近观察到谐振点。此外，当振动频率低于触觉传感器的共振频率时，立式悬臂可以无延迟地跟随PDMS覆盖物的振荡变形，并且触觉传感器的灵敏度不变。分析和实验结果表明，PDMS覆盖对埋入悬臂梁的动态行为有明显的影响，触觉传感器同样适用于静态和振荡输入。
This paper reports on the dynamic characteristics of a micro silicon standing cantilever embedded in a silicone elastomer, polydimethylsiloxane (PDMS). This combined structure, which consists of materials with significantly different Young's moduli, is employed as a tactile sensor for shear-strain measurement. The frequency responses of the tactile sensor show no resonance near the intrinsic resonant frequency of the standing cantilever, whereas the resonant point was observed near the intrinsic resonant frequency of the PDMS covering. In addition, when the oscillation frequency is below the resonant frequency of the tactile sensor, the standing cantilever can follow the oscillating deformation of the PDMS covering with no delay, and the sensitivity of the tactile sensor does not change. The analytical and experimental results show that the PDMS covering has a dominant influence on the dynamic behavior of the embedded cantilever, and the tactile sensor can be applied to both static and oscillating input in the same way.