Discharge plasmas generated by piezoelectric transformers and their applications
Discharge plasmas generated by piezoelectric transformers and their applications
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DOI：
10.1088/0963-0252/15/2/s07
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发表时间：
2006-04
影响因子：
3.8
通讯作者：
H. Itoh;K. Teranishi;S. Suzuki
中科院分区：
文献类型：
--
作者：
H. Itoh;K. Teranishi;S. Suzuki
本文综述了压电变压器放电等离子体的特性和基于压电变压器的等离子体反应器的实际应用。Pb（Zr · Ti）O3压电陶瓷通过压电效应产生高压，激发和电离原子和分子，产生放电等离子体。当PT表面和具有金属背电极的电介质层之间存在窄间隙时，在大气压以上发生介质阻挡放电（DBD）。PT的机械振动和由此产生的表面电位，这涉及到机电能量转换的压电效应，分别使用激光多普勒测振仪和探针法进行了研究。利用增强型电荷耦合器件照相机检测介质阻挡放电的光场，研究了介质阻挡放电的特性，确定了介质阻挡放电的基本参数。PT产生的DBD被证明是适用于臭氧生成和作为准分子灯，和高功率操作证明使用并行驱动的六等离子体反应器。
The characteristics of discharge plasma generated by piezoelectric transformers (PTs) and the practical applications of PT-based plasma reactors are reviewed in this paper. PTs of Pb(Zr · Ti)O3 generate high voltage by the piezoelectric effect, which can cause excitation and ionization of atoms and molecules, resulting in the generation of discharge plasma. When a narrow gap exists between the PT surface and a dielectric layer having a metal back electrode, dielectric barrier discharge (DBD) occurs at atmospheric pressure and above. The mechanical vibration of the PT and the resultant surface potential, which relate to electro-mechanical energy conversion by the piezoelectric effect, are investigated using a laser Doppler vibrometer and probe method, respectively. The characteristics of DBD are examined based on light patterns detected by the intensified charge coupled device camera, and the fundamental parameters of the filamentary discharge are determined. PT-generated DBD is shown to be applicable for ozone generation and as excimer lamps, and high-power operation is demonstrated using a parallel-driven hexad plasma reactor.