Multi-mode resistive spectroscopy for precisely controlling morphology of extremely narrow gap palladium nanocluster array
Multi-mode resistive spectroscopy for precisely controlling morphology of extremely narrow gap palladium nanocluster array
复制标题
多模电阻光谱精确控制极窄间隙钯纳米团簇阵列的形貌
DOI：
10.1063/5.0049536
复制
发表时间：
2021
影响因子：
1.6
通讯作者：
Ogi H.
中科院分区：
文献类型：
--
作者：
Nakamura N.;Kashiuchi K.;Ogi H.
在衬底上沉积金属材料的过程中，在孤立的簇和连续膜之间的过渡处瞬时形成具有极窄间隙的纳米簇阵列结构。纳米团簇阵列具有不同于孤立团簇和连续薄膜的独特电学性质。纳米团簇阵列的电性能根据其形态而显著变化，并且精确控制沉积时间对于获得期望的电性能是必不可少的。然而，转变的检测并不简单。为了克服这个问题，我们发展了多模式电阻光谱技术。它使用压电材料的共振振动来评估沉积过程中的形态变化，并能够制造具有略微不同形态的纳米团簇阵列。利用该方法制备了不同形貌的钯纳米团簇阵列，并通过评估其对氢气的电响应来验证多模电阻谱的有效性。
During the deposition of a metallic material on a substrate, a nanocluster-array structure with an extremely narrow gap is formed transiently at the transition between isolated clusters and the continuous film. It is known that the nanocluster array shows a unique electrical property different from that of isolated clusters and the continuous film. The electrical property of the nanocluster array changes significantly depending on its morphology, and precise control of the deposition time is indispensable to obtain a desired electrical property. However, the detection of the transition is not straightforward. To overcome this problem, we develop the multi-mode resistive spectroscopy. It evaluates the morphological change during deposition using resonant vibrations of a piezoelectric material and enables the fabrication of nanocluster arrays with a slightly different morphology. Palladium nanocluster arrays with different morphologies are fabricated using this method, and the availability of the multi-mode resistive spectroscopy is demonstrated by evaluating their electrical response to hydrogen gas.