Optical fiber bundle displacement sensor using an ac-modulated light source with subnanometer resolution and low thermal drift.
Optical fiber bundle displacement sensor using an ac-modulated light source with subnanometer resolution and low thermal drift.
复制标题
使用具有亚纳米分辨率和低热漂移的交流调制光源的光纤束位移传感器。
DOI：
10.1364/ao.34.005854
复制
发表时间：
1995
期刊：
影响因子：
1.9
通讯作者：
Kohichi Tanaka
中科院分区：
文献类型：
--
作者：
A. Shimamoto;Kohichi Tanaka
提出了一种具有亚纳米级分辨率和低热漂移的光纤束位移传感器。该装置基于载波放大器系统，并涉及消除光源光功率波动的技术。传感器达到的噪声水平为0.03nm/√Hz。通过比较同一目标的两个不同传感器 4 ks（67 分钟）的输出来估计稳定性。两个传感器的光纤束端部与目标表面之间的相对位移在 400 nm 范围内变化，具体取决于 2 °C 的环境温度变化。然而，在超过 1 小时的测量中，两个传感器系统之间的输出差异在 2 nm 以内。如果环境温度控制在±0.1℃以内，预计可以缩小到0.1nm以内。结论是传感器的稳定性足够好，可以与纳米技术仪器一起使用。
An optical fiber bundle displacement sensor with subnanometer order resolution and low thermal drift is proposed. The setup is based on a carrier amplifier system and involves techniques to eliminate fluctuation in the light power of the source. The achieved noise level of the sensor was 0.03nm/√Hz. The stability was estimated by comparing the outputs of two different sensors from the same target for 4 ks (67 min). The relative displacements between the fiber bundle ends of the two sensors and the target surface varied in the area of 400 nm depending on the ambient temperature variation at 2 °C. However, the difference in output between the two sensor systems is within 2 nm for more than 1 hour of measurement. It is expected that it would be reduced to within the area of 0.1 nm if the ambient temperature were controlled to within ±0.1 °C. It is concluded that the stability of the sensors is sufficiently good to be used with nanotechnological instruments.