Two-dimensional straightness measurement based on optical knife-edge sensing
Two-dimensional straightness measurement based on optical knife-edge sensing
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DOI：
10.1063/1.5002711
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发表时间：
2017-09-01
影响因子：
1.6
通讯作者：
Ellis, Jonathan D.
中科院分区：
文献类型：
--
作者：
Wang, Chen;Zhong, Fenghe;Ellis, Jonathan D.
直线度误差是一种沿沿着垂直于直线工作台主位移轴方向的寄生平移。寄生平移可以耦合到多轴平台的其他主位移方向。因此，其测量和补偿在精密多轴计量、校准和制造中至关重要。提出了一种基于二维光学刀口传感的二维直线度测量系统，该系统具有结构简单、重量轻、体积小、易于对准等优点。该方法利用二维光学刀口对四象限光电探测器检测到的衍射图样进行处理，其输出电压经过校准处理后可以得到二维直线度误差。本文分析了该配置的物理模型，并进行仿真和实验，研究系统的灵敏度，测量非线性和误差来源。结果表明，与传统的无刀口结构相比，该结构具有更高的灵敏度和对梁振动的不敏感性，在40 mm主轴向运动沿着± 40 μ m测量范围内，可实现± 0.25 μ m的测量。出版社：AIP Publishing
Straightness error is a parasitic translation along a perpendicular direction to the primary displacement axis of a linear stage. The parasitic translations could be coupled into other primary displacement directions of a multi-axis platform. Hence, its measurement and compensation are critical in precision multi-axis metrology, calibration, and manufacturing. This paper presents a two-dimensional (2D) straightness measurement configuration based on 2D optical knife-edge sensing, which is simple, light-weight, compact, and easy to align. It applies a 2D optical knife-edge to manipulate the diffraction pattern sensed by a quadrant photodetector, whose output voltages could derive 2D straightness errors after a calibration process. This paper analyzes the physical model of the configuration and performs simulations and experiments to study the system sensitivity, measurement nonlinearity, and error sources. The results demonstrate that the proposed configuration has higher sensitivity and insensitive to beam's vibration, compared with the conventional configurations without using the knife-edge, and could achieve +/- 0.25 mu m within a +/- 40 mu m measurement range along a 40 mm primary axial motion. Published by AIP Publishing.