Miniaturized flowthrough microdispenser with piezoceramic tripod actuation
Miniaturized flowthrough microdispenser with piezoceramic tripod actuation
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DOI：
10.1109/jmems.2004.839000
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发表时间：
2005-02-01
影响因子：
2.7
通讯作者：
Laurell, T
中科院分区：
文献类型：
--
作者：
Bergkvist, J;Lilliehorn, T;Laurell, T
在本文中，硅流通微分配器的进一步发展进行了描述。之前报道的分配器设计使用双晶和后来的多层压电致动器元件来产生液滴。多层致动器的引入显著降低了分配液滴所需的电压幅度。与化学分析系统相关的分配器特性，例如，减小的样品体积、内表面积和分散性通过装置的小型化得到改善。在本文中，提出了一种新的致动器设计，三脚架，使进一步分配器小型化，并方便设备组装。三脚架致动器的制造使用原型制作过程中，基于微铣削，多层压电陶瓷组件。基于微结构柔性印刷电路的小型化电气互连的构建技术，也建议符合未来小型化的前景。评价了三脚架驱动的分配器的微流体特性。证明了在0至3 kHz的频率范围内稳定的液滴产生，提供了7.8穆尔/min的最大分配流速。
In this paper, the further development of a silicon flowthrough microdispenser is described. Previously reported designs of the dispenser used bimorph, and later multilayered, piezoelectric actuator elements for the generation of droplets. The introduction of a multilayered actuator significantly reduced the voltage amplitude needed to dispense droplets. Dispenser properties relevant for chemical analysis systems, e.g., reduced sample volume, internal surface area, and dispersion, were improved by miniaturization of the device. In this paper, a new actuator design, the tripod, is presented to enable further dispenser miniaturization and to facilitate device assembly. Tripod actuators were manufactured using a prototyping process, based on micromilling, for multilayer piezoceramic components. A building technique for miniaturized electrical interconnects, based on microstructured flexible printed circuits, is also suggested in line with the prospect of future miniaturization. The microfluidic properties of the tripod- actuated dispenser were evaluated. Stable droplet generation in the frequency range from 0 to 3 kHz was demonstrated, providing a maximum dispensed flow rate of 7.8 muL/min.