Electrical activation and electron spin resonance measurements of implanted bismuth in isotopically enriched silicon-28
Electrical activation and electron spin resonance measurements of implanted bismuth in isotopically enriched silicon-28
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同位素富集硅 28 中注入铋的电激活和电子自旋共振测量
DOI:
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发表时间:
2012
期刊:
影响因子:
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通讯作者:
Thomas Schenkel
中科院分区:
文献类型:
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作者:
C. Weis;C. Lo;C. Lo;V. Lang;A. Tyryshkin;Richard George;Kin Man Yu;J. Bokor;S. Lyon;J. Morton;Thomas Schenkel
We have performed continuous wave and pulsed electron spin resonance measurements of implanted bismuth donors in isotopically enriched silicon-28. Donors are electrically activated via thermal annealing with minimal diffusion. Damage from bismuth ion implantation is repaired during thermal annealing as evidenced by narrow spin resonance linewidths (Bpp=12μT) and long spin coherence times (T2=0.7 ms, at temperature T=8 K). The results qualify ion implanted bismuth as a promising candidate for spin qubit integration in silicon.