A 2-in. mosaic wafer made of a single-crystal diamond
A 2-in. mosaic wafer made of a single-crystal diamond
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DOI：
10.1063/1.4868720
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发表时间：
2014-03-10
影响因子：
4
通讯作者：
Shikata, S.
中科院分区：
文献类型：
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作者：
Yamada, H.;Chayahara, A.;Shikata, S.
我们合成了2英寸的马赛克钻石晶片。尺寸(40×60 mm(2))，由24块面积为10×10 mm(2)的单晶金刚石(SCD)板组成，采用微波等离子体化学气相沉积。即使使用克隆技术，裂纹也经常发生，对于大于1英寸的晶片来说，不均匀现象非常明显。在尺寸上。这在以前没有在较小的样本中观察到过。合适的晶向可以避免开裂，是制备大面积SCD晶片的主要因素之一。通过与数值模拟的比较，突出了衬底温度分布的均匀性对生长的均匀性的重要性。(C)2014 AIP出版有限责任公司。
We synthesized a mosaic diamond wafer 2 in. in size (40 x 60 mm(2)), which consisted of 24 single-crystal diamond (SCD) plates 10 x 10 mm(2) in area, by using microwave plasma chemical vapor deposition. Even by using a cloning technique, cracking frequently occurred and the non-uniformity was remarkable for wafers that were larger than 1 in. in size. This has not been observed in smaller samples before. Appropriate crystallographic directions could avoid the cracking and is one of the predominant factors in fabricating large area SCD wafers. Comparison with numerical simulations highlighted the importance of uniformity of the substrate temperature distribution on the uniformity of the growth. (C) 2014 AIP Publishing LLC.