Stability and Schottky barrier of silicides: First-principles study

Stability and Schottky barrier of silicides: First-principles study
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DOI:
10.1016/j.mee.2009.03.018
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发表时间:
2009-07-01
影响因子:
2.3
通讯作者:
Shinji, S.
Shinji, S.
中科院分区:
工程技术3区
文献类型:
--
作者:
Nakayama, T.;Sotome, S.;Shinji, S.

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使用第一性原理计算,我们解释了为什么一些金属原子,如Ni产生体硅化物和其他人一样,Au从来没有产生硅化物,为什么硅化物与一些化学计量是难以生长在Si衬底上,以及为什么肖特基势垒的电子简单地降低硅化物中的Si比的增加。结果表明,电子从Si p轨道向金属原子d轨道的转移以及界面处弹性应变和键断裂引起的能量损失是这些问题的关键根源。(C)2009 Elsevier B.V.保留所有权利。
Using first-principles calculations, we explain why some metal atoms such as Ni produce bulk silicides and the others like Au never produce silicides, why silicides with some stoichiometry are difficult to grow on Si substrate, and why Schottky barrier for electrons simply decreases as the Si ratio in silicides increases. It is shown that the key origins to answer these questions are the electron transfer from Si-p to metal-atom-d orbitals and the energy losses by the elastic strain and the bond-breaking at the interface. (C) 2009 Elsevier B.V. All rights reserved.