Modelling of a shear-type piezoelectric actuator for AFM-based vibration-assisted nanomachining
Modelling of a shear-type piezoelectric actuator for AFM-based vibration-assisted nanomachining
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DOI：
10.1016/j.ijmecsci.2022.108048
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发表时间：
2022-12
影响因子：
7.3
通讯作者：
Xue Bo;Brousseau Emmanuel;Bowen Chris
中科院分区：
文献类型：
--
作者：
Xue Bo;Brousseau Emmanuel;Bowen Chris
最近的研究调查报告的好处，提高传统的AFM为基础的纳米加工操作的AFM针尖和加工材料之间的高频振动的介绍。该技术依赖于压电致动，并且在实践中相对直接地实现。然而，当在高电场和频率条件下操作时，压电致动器的非线性会影响所制造的纳米结构的尺寸精度。为了解决这些问题，本文报道了一种基于耦合机电有限元（FE）建模的方法来预测AFM针尖和工件之间的相对运动，用于基于振动辅助AFM的纳米加工应用。特别是，所提出的方法的新奇在于，它结合了两个经典的方法建模的压电材料的非线性行为。更具体地说，两个来源的非线性被认为是同时通过结合场依赖模型从穆勒和张与频率依赖模型从Damjanovic。由此产生的组合模型，建立压电本构方程中实现的开发耦合场有限元模型。这项工作的另一个显著特点是，所提出的方法随后通过比较纳米级凹槽的预测宽度与使用基于AFM的振动辅助纳米加工配置加工的纳米级凹槽进行了验证。
Recent research investigations have reported the benefit of enhancing conventional AFM-based nanoscale machining operations by the introduction of high frequency vibrations between the AFM tip and the processed material. The technique relies on piezoelectric actuation and is relatively straight forward to implement in practice. However, the non-linearity of piezoelectric actuators when operated under high electric field and frequency conditions can affect the dimensional accuracy of the fabricated nanostructures. To address these issues, the paper reports a method based on coupled mechanical-electrical Finite Element (FE) modelling to predict the relative motion between an AFM tip and a workpiece for vibration-assisted AFM-based nanomachining applications. In particular, the novelty of the proposed method is that it combines two classical approaches for modelling the nonlinear behaviour of piezoelectric materials. More specifically, two sources of non-linearity are considered simultaneously by combining the field-dependant model from Muller and Zhang with the frequency-dependant model from Damjanovic. The resulting combined model is employed to establish the piezoelectric constitutive equations implemented in the developed coupled field FE model. A further distinguishing characteristic of the work is that the proposed approach was subsequently validated by comparing the predicted widths of nanoscale grooves against those machined with a custom AFM-based vibration-assisted nanomachining configuration.