ADHESION, SURFACE MORPHOLOGY, AND GAS SENSING CHARACTERISTICS OF THIN-GOLD-FILM CHEMICAL SENSORS
ADHESION, SURFACE MORPHOLOGY, AND GAS SENSING CHARACTERISTICS OF THIN-GOLD-FILM CHEMICAL SENSORS
复制标题
薄膜金膜化学传感器的粘附力、表面形貌和气敏特性
DOI：
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发表时间：
1994
期刊：
影响因子：
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通讯作者：
W. Glaunsinger
中科院分区：
文献类型：
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作者：
K. Yoo;I. Sorensen;W. Glaunsinger
在高真空电阻加热蒸发器中，在环境温度和 250°C 下将 Au、Au/Cr、Au/Ni/Cr 和 Au/Pd/Cr 体系的薄膜沉积在氧化铝基板上，并分别在空气中于 300、450 和 600°C 下退火 1 小时。具有Cr粘合层的金膜表现出改善的膜对基底的粘合力。拉拔测试表明，在 600°C 退火后，在环境温度下沉积的 Au/Cr 薄膜的附着力增加了一倍多。使用扫描电子显微镜观察金膜的表面形貌。还使用四点探针法研究了每层的薄层电阻。最后，在室温下测量硫化氢 (H2S) 的传感特性，例如在薄膜暴露于气体期间观察到的电阻变化。 Au/Cr 系统对 H2S 的灵敏度是四个系统中最高的。俄歇电子能谱分析的结果是，Au/Ni/Cr 和 Au/Pd/Cr 系统...
Thin films of the Au, Au/Cr, Au/Ni/Cr, and Au/Pd/Cr systems were deposited on alumina substrates at ambient temperature and 250 °C in a high‐vacuum resistance heated evaporator, and annealed at 300, 450, and 600 °C for 1 h in air, respectively. The gold films with a Cr adhesive layer exhibited improved adhesion of the films to the substrate. Pull‐off tests demonstrated that the adhesion of the Au/Cr films deposited at ambient temperature more than doubled after annealing at 600 °C. The surface morphology of the gold films was observed using scanning electron microscopy. The sheet resistance of each layer was also investigated using a four‐point probe method. Finally, the sensing characteristics as exemplified by observed resistance changes during exposure of the films to a gas were measured at room temperature for hydrogen sulfide (H2S). The sensitivity of the Au/Cr system for H2S is the highest of the four systems. As a result of the Auger‐electron spectroscopy analysis, the Au/Ni/Cr and Au/Pd/Cr systems...