Atomic-Resolution Imaging with a Sub-50-pm Electron Probe
Atomic-Resolution Imaging with a Sub-50-pm Electron Probe
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DOI：
10.1103/physrevlett.102.096101
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发表时间：
2009-03-06
影响因子：
8.6
通讯作者：
Dahmen, Ulrich
中科院分区：
文献类型：
--
作者：
Erni, Rolf;Rossell, Marta D.;Dahmen, Ulrich
在一台五阶像差校正的透射电子显微镜中使用高度相干的聚焦电子探针，我们报道了对小于50皮米的晶体间距的分辨。基于几何源尺寸以及残余的相干和非相干轴向透镜像差，计算出一个电子探针，从理论上讲，它能够分辨出具有29%对比度的理想的47皮米间距。我们的实验数据显示，在60% - 95%的置信水平下，以11% - 18%的对比度对锗<114>晶体的47皮米间距进行了成像，这为环形暗场扫描透射电子显微镜成像中小于50皮米的分辨率提供了首个直接证据。
Using a highly coherent focused electron probe in a fifth-order aberration-corrected transmission electron microscope, we report on resolving a crystal spacing less than 50 pm. Based on the geometrical source size and residual coherent and incoherent axial lens aberrations, an electron probe is calculated, which is theoretically capable of resolving an ideal 47 pm spacing with 29% contrast. Our experimental data show the 47 pm spacing of a Ge < 114 > crystal imaged with 11%-18% contrast at a 60%-95% confidence level, providing the first direct evidence for sub-50-pm resolution in annular dark-field scanning transmission electron microscopy imaging.