Near-Field Distribution of Radial Line Slot Antenna for Surface-Wave-Coupled Plasma Generation
Near-Field Distribution of Radial Line Slot Antenna for Surface-Wave-Coupled Plasma Generation
复制标题
用于表面波耦合等离子体产生的径向线缝隙天线的近场分布
DOI：
10.1143/jjap.40.380
复制
发表时间：
1999
影响因子：
1.5
通讯作者：
Y. Yasaka
中科院分区：
文献类型：
--
作者：
Tetsuya Yamamoto;M. Ono;M. Ando;N. Goto;N. Ishii;Y. Yasaka
在大尺寸晶圆的等离子体处理系统中，迫切需要通过缩小处理空间来快速排出反应气体，以实现微电子器件更高的生产率和更好的质量。在这种情况下，晶圆必须放置在靠近天线孔径的位置。用于表面波耦合等离子体（SWP）的径向线缝隙天线（RLSA）是实现这一目标的有希望的候选者。制造并测试了由密集排列的横向槽组成的孔径中的新颖槽排列。先前的实验已经实现了低电子温度下均匀、高密度（3×1011 cm-3）、大面积的等离子体。它省去了 ECR 系统所需的直流磁场。为了进一步开发槽设计以及确定等离子体产生的机制，在本文中，我们评估了 SWP-RLSA 的电磁近场。第一步，使用周期阵列模型分析没有等离子体和玻璃真空窗的自由空间中的天线。将预测的近场分布与之前的实验进行比较，得出合理的一致性。
In plasma processing systems for large-size wafers, quick evacuation of reaction gas by making the process space narrow is urgently required to realize higher productivity and better quality for microelectronic devices. Wafers must be placed close to the antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated and tested. A uniform, high-density (3×1011 cm-3) and large-area plasma at low electron temperature has already been realized in previous experiments. It dispenses with the DC magnetic fields required in ECR systems. For further development of the slot design, as well as the mechanism determination of plasma generation, in this paper we evaluate the electromagnetic near fields of SWP-RLSAs. As the first step, antennas in free space without the plasma as well as a glass vacuum window, are analyzed using a periodic array model. The predicted near-field distribution is compared with those of previous experiments and a reasonable agreement is reported.