小川智哉他: "Ditection and mapping of interstitial oxygen in Cz silicon wafers by light scattering" Proceedings of the 6th International Conference of Defects Recognition and Image Processing. (印刷中). (1996)

小川智哉他: "Ditection and mapping of interstitial oxygen in Cz silicon wafers by light scattering" Proceedings of the 6th International Conference of Defects Recognition and Image Processing. (印刷中). (1996)
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Tomoya Okawa 等人:“通过光散射检测和绘制 Cz 硅片中的间隙氧”,第六届国际缺陷识别和图像处理会议论文集(1996 年出版)。

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