Reliability of potassium ion electret in silicon oxide for vibrational energy harvester applications
Reliability of potassium ion electret in silicon oxide for vibrational energy harvester applications
复制标题
氧化硅中钾离子驻极体用于振动能量收集器应用的可靠性
DOI：
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
H. Toshiyoshi
中科院分区：
文献类型：
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作者：
K. Misawa;T. Sugiyama;G. Hashiguchi;H. Toshiyoshi
在本文中，我们报告的长期可靠性钾离子驻极体包括在热生长的氧化硅。这项工作中的驻极体用于微机电系统（MEMS）能量采集器，以从机械振动中产生电流。通过硅微机械加工开发了类似于梳状驱动静电致动器的弹簧质量系统，并且通过氢氧化钾起泡器通过湿氧化来氧化表面，从而包括高浓度的钾原子。然后在650 °C下施加150 V的电压使钾电极化5 min。在1 × 10−3 Pa的真空中，在350、400和450 °C的高温下监测储存的极化电位的退化。电位衰减-1 dB所需的时间被用作驻极体的寿命，阿克里乌斯外推图表明在25 °C下的寿命超过400年。
In this paper, we report on the long-term reliability of potassium ion electret included in a thermally grown silicon oxide. The electret in this work is used in a microelectromechanical systems (MEMS) energy harvester to generate electrical current from mechanical vibration. A spring-mass system similar to a comb-drive electrostatic actuator is developed by silicon micromachining, and the surface is oxidized by wet-oxidation through a potassium hydroxide bubbler, thereby including potassium atoms at a high concentration. The potassium is then electrically polarized by an applied voltage of 150 V at 650 °C for 5 min. Degradation of the stored polarization potential is monitored in a vacuum of 1 × 10−3 Pa at elevated temperatures of 350, 400, and 450 °C. The time needed to cause a −1 dB decay of the potential is used as the lifetime of the electret, and the Arrhenius extrapolation plot suggested a life time of more than 400 years at 25 °C.