Optofluidic laser array based on stable high-Q Fabry-Pérot microcavities.
Optofluidic laser array based on stable high-Q Fabry-Pérot microcavities.
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基于稳定高 Q 法布里-珀罗微腔的光流控激光阵列
DOI：
10.1039/c5lc00847f
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发表时间：
2015-10-07
期刊：
影响因子：
6.1
通讯作者：
Fan X
中科院分区：
文献类型：
--
作者：
Wang W;Zhou C;Zhang T;Chen J;Liu S;Fan X
我们报告了一种使用稳定的平凹法布里-珀罗（FP）微腔在芯片上制造的光流体激光器阵列的发展，这种微腔在器件组装过程中比常用的平凹FP微腔更不易受到光学失准的影响。我们的FP微腔中的凹面镜是通过首先使用CO2激光器在熔融石英芯片上产生几微米深和几十微米直径的微孔阵列，然后涂覆分布式布拉格反射（DBR）层来产生的。平凹FP微腔具有5.6×105的Q因子和4×103的精细度，比现有的光流体激光器中的FP微腔高100倍以上。在乙醇中的ImM R6 G染料用于测试平凹FP微腔，显示出仅90 nJ/mm 2的超低激光阈值，比由相同芯片上的相同DBR涂层形成的相应不稳定的平凹FP微腔中的激光阈值低10倍以上。同时激光发射从芯片上的光流体激光器阵列和单模激射操作也被证明。我们的工作将导致基于光流体激光的生化传感器和具有极低的激光阈值（nJ/mm 2）和模式体积（fL）的新型片上光子器件的发展。
We report the development of an optofluidic laser array fabricated on a chip using stable plano-concave Fabry-Pérot (FP) microcavities, which are far less susceptible to optical misalignment during device assembly than commonly used plano-plano FP microcavities. The concave mirrors in our FP microcavities were created by first generating an array of microwells of a few micrometers in depth and a few tens of micrometers in diameter on a fused silica chip using a CO2 laser, followed by coating of distributed Bragg reflection (DBR) layers. The planoconcave FP microcavity had a Q-factor of 5.6×105 and finesse of 4×103, over 100 times higher than those for the FP microcavities in existing optofluidic lasers. 1 mM R6G dye in ethanol was used to test the plano-concave FP microcavities, showing an ultralow lasing threshold of only 90 nJ/mm2, over 10 times lower than that in the corresponding unstable plano-plano FP microcavities formed by the same DBR coatings on the same chip. Simultaneous laser emission from the optofluidic laser array on the chip and single-mode lasing operation were also demonstrated. Our work will lead to the development of optofluidic laser based biochemical sensors and novel on-chip photonic devices with extremely low lasing thresholds (nJ/mm2) and mode volumes (fL).