Calculation of cathode heating in analytical glow discharges
Calculation of cathode heating in analytical glow discharges
复制标题
分析辉光放电中阴极加热的计算
DOI：
10.1039/b400483c
复制
发表时间：
2004
影响因子：
3.4
通讯作者：
R. Gijbels
中科院分区：
文献类型：
--
作者：
A. Bogaerts;R. Gijbels
在分析辉光放电的阴极（样品）的温度计算作为在样品中的深度的函数，通过一个一维的热传导方程。能量输入由轰击阴极的高能离子和原子决定。在各种条件下对Cu样品进行了计算，范围从背面的完全冷却到无冷却的极限。放电条件（电压-压力-电流）的效果也进行了研究。最后，对各种阴极材料进行了模拟。结果表明，冷却效率对阴极表面温度有重要影响。此外，对于相同的功率输入，不同的阴极材料由于不同的热导率而可能引起阴极表面温度的巨大差异。
The temperature of the cathode (sample) in analytical glow discharges is calculated as a function of depth in the sample, by means of a one-dimensional heat conduction equation. The energy input is determined by the energetic ions and atoms bombarding the cathode. Calculations are performed for a Cu sample, under various conditions, ranging from perfect cooling from the backside, to the limit of no cooling. The effect of the discharge conditions (voltage–pressure–current) is also investigated. Finally, simulations are carried out for various cathode materials. It is found that the efficiency of cooling has a very important effect on the cathode surface temperature. Moreover, different cathode materials can give rise to great differences in the cathode surface temperature for the same power input, due to a different thermal conductivity.