Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer
Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer
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DOI：
10.1109/lpt.2008.921840
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发表时间：
2008-05
影响因子：
2.6
通讯作者：
Jia-sheng Ye;N. Matsuyama;Y. Kanamori;K. Hane
中科院分区：
文献类型：
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作者：
Jia-sheng Ye;N. Matsuyama;Y. Kanamori;K. Hane
在这封信中，我们利用微光刻和纳米光刻技术制作了一种无衬底的硅悬浮光栅。实验测量表明，它起到了微光学滤光片的作用，这是由于光栅的导模共振效应造成的。用严格耦合波方法进行的理论计算与实验观测结果吻合较好。
In this letter, a silicon suspended grating without a substrate is fabricated using micro- and nanolithography technologies. Experimental measurements reveal that it serves as a microoptical filter, which is due to guided mode resonance effect of the grating. Theoretical calculations by a rigorous coupled wave method prove to be in agreement with the experimental observations.