Fabrication of polymer micro-lens array by micro-fluid digitalization
Fabrication of polymer micro-lens array by micro-fluid digitalization
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DOI：
10.3788/ope.20142202.0360
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
朱晓阳 Zhu Xiao-yang;侯丽雅 Hou Li-ya;郑. Z. Yue;王洪成 Wang Hong-cheng;章维一 Zhang Wei-yi
中科院分区：
文献类型：
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作者：
朱晓阳 Zhu Xiao-yang;侯丽雅 Hou Li-ya;郑. Z. Yue;王洪成 Wang Hong-cheng;章维一 Zhang Wei-yi
在微流体技术数字化的基础上，构建了微透镜阵列按需滴注(DOD)制备实验系统，以紫外光固化胶粘剂为喷射材料，将其喷射到涂有疏水薄膜的玻璃基板上，利用表面张力和疏水效应在玻璃基板上形成液体平凸微滴，研究了系统参数对稳定微射和微透镜直径的影响。结果表明，稳定微射可得到粘度为50×10-3Pa.S的紫外光固化胶粘剂，制备出直径为25μm的微透镜。通过实验获得了直径变异系数为0.64%、焦距非均匀性为1.7%的15×15微透镜阵列。微透镜在扫描电子显微镜下表现出良好的表面形貌，用白光干涉仪(VSI模式)得到的表面粗糙度为247.69 nm(扫描面积为29.4μm×39.3μm)，扫描区域轮廓曲线光滑。通过微透镜的投影成像实验，实验结果表明，基于微流体数字化技术的微透镜阵列DOD喷射制作工艺简单、成本低、工艺参数稳定，微透镜具有良好的几何和光学性能。
On the basis of the digitalization of microfluids technology,an experimental system for the drop-on-demand(DOD)jetting fabrication of micro-lens array was constructed.The UV-curable adhesive was taken as the jetting material and it was jetted on the glass substrate coated with the hydrophobic film.Then,liquid plano convex micro-droplet could be formed on the glass substrate by surface tension and hydrophobic effect,and the micro-lens array was obtained after the UV light polymerization at a room temperature.The influences of the system parameters on the stable micro-jetting and the diameter of micro-lens were researched.Results show that the UV-curable adhesive with a viscosity of 50×10-3 Pa·s can be obtained in stable micro-jetting and the micro-lens with a diameter of 25μm is prepared.Furthermore,a 15 × 15micro-lens array is obtained by experiments with the coefficient of variation diameter of 0.64%and non-uniformity of the focal length of 1.7%.The microlens shows a good surface morphology in a Scanning Electron Microscopy(SEM)and its surface roughness is 247.69nm(scanning area:29.4μm×39.3μm)by the white light interferometer(VSImode)and the profile curves of the scanning area are smooth.Through the projection image experiment of the micro-lens,the clear real image of the micro-lens array is obtained.Experimental results indicate that the DOD jetting fabrication of the micro-lens array based on the digitalization of microfluids technology has advantages of simple process,low costs,stable process parameters and the microlens has good geometry and optical performance.