Fabrication of 2D pH CMOS image sensors and real time imaging of chemical reaction

Fabrication of 2D pH CMOS image sensors and real time imaging of chemical reaction
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二维pH CMOS图像传感器的制作和化学反应的实时成像

DOI:
10.1109/sensor.2005.1497277
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发表时间:
2005
期刊:
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
影响因子:
--
通讯作者:
M. lshida
M. lshida
中科院分区:
--
文献类型:
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作者:
T. Hizawa;K. Sawada;H. Takao;M. lshida

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我们介绍了pH图像传感器,它能够真实的实时测量各种化学反应的二维分布。使用电荷转移技术的pH CMOS图像传感器是能够将化学反应的变化测量为图像的新型pH传感器和图像传感器,并且其通过CMOS(互补金属氧化物半导体)电路工艺技术制造。成功地制作了原型pH CMOS图像传感器,并以每帧1/30秒的速度测量了运动图像中各种化学反应的二维分布。可以预期,pH CMOS图像传感器能够用于诸如医学和生物化学领域的新应用。
We present about pH image sensors, which are capable of measuring 2D distribution of various chemical reaction in real time. The pH CMOS image sensor using charge transfer technique is a novel pH sensor and imaging sensor that is capable of measuring variations on the chemical reaction as an image, and it was fabricated by CMOS (complimentary metal-oxide semiconductor) circuit process technology. Prototype pH CMOS image sensors are successfully fabricated and measured 2D distribution of various chemical reactions in moving image at 1/30 sec per 1 frame. It is expected that the pH CMOS image sensor is able to use for novel applications such as medical and biochemistry field.