Non-linear processes in the gas cluster ion beam modification of solid surfaces
Non-linear processes in the gas cluster ion beam modification of solid surfaces
复制标题
固体表面气体团簇离子束改性的非线性过程
DOI：
10.1016/s0921-5093(98)00733-3
复制
发表时间：
1998
期刊：
影响因子：
6.4
通讯作者：
Z. Insepov
中科院分区：
文献类型：
--
作者：
I. Yamada;J. Matsuo;N. Toyoda;T. Aoki;E. Jones;Z. Insepov
评述了气体团簇离子束加工的独特性。从各种气体材料中产生了由数百到数千个原子组成的团簇离子束。在加速的团簇离子对衬底表面的影响期间的多次碰撞产生基本上非线性的轰击过程。这些轰击特性可应用于浅离子注入、高产率溅射和平滑、表面清洁和低温薄膜形成。
The unique characteristics of gas cluster ion beam processing are reviewed. Cluster ion beams consisting of hundreds to thousands of atoms have been generated from various kinds of gas materials. Multiple collisions during the impact of accelerated cluster ions upon the substrate surfaces produce fundamentally non-linear bombarding processes. These bombarding characteristics can be applied to shallow ion implantation, high yield sputtering and smoothing, surface cleaning and low temperature thin film formation.