Nanotextures fabricated by microwave plasma CVD: application to ultra water-repellent surface
Nanotextures fabricated by microwave plasma CVD: application to ultra water-repellent surface
复制标题
微波等离子体CVD制备的纳米纹理：在超防水表面的应用
DOI：
10.1016/s0257-8972(03)00420-1
复制
发表时间：
2003
影响因子：
5.4
通讯作者：
O. Takai
中科院分区：
文献类型：
--
作者：
Yunying Wu;M. Kuroda;H. Sugimura;Y. Inoue;O. Takai
通过纳米复制工艺制造了具有高防水性的纳米纹理表面的聚合物片材。首先，以有机硅化合物为原料，通过微波等离子体增强CVD（MPECVD）在硅基板上沉积超防水二氧化硅薄膜。通过改变沉积压力来控制薄膜表面的纳米纹理。其次，通过电铸将薄膜的表面纳米纹理复制到镍模具上。第三，通过旋涂将聚苯乙烯（PS）涂覆在镍模具上，并通过该工艺制造纳米纹理的PS复制品。纳米纹理 PS 复制品的接触角为 130°，而 PS 平板的接触角为 90°。
Nanotextured surfaces of polymer sheets with high water-repellency were fabricated through a nano-replica process. First, ultra water-repellent silica thin films were deposited onto Si substrates by microwave plasma-enhanced CVD (MPECVD) using an organosilicon compound as a raw material. The nanotextures of the film surface were controlled by changing deposition pressure. Second, the surface nanotextures of the films were replicated to Ni molds by electroforming. Third, polystyrene (PS) was coated on the Ni molds by spin coating and the nanotextured PS replicas were fabricated by this process. The contact angles of the nanotextured PS replicas were 130°, while 90° were obtained for PS flat sheets.