Characterizing fruit fly flight behavior using a micro force sensor with a new comb drive configuration
Characterizing fruit fly flight behavior using a micro force sensor with a new comb drive configuration
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DOI：
10.1109/mems.2004.1290715
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发表时间：
2004-09
期刊：
影响因子：
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通讯作者：
Yu Sun;D. P. Potasek;S. N. Fry;B. Nelson
中科院分区：
文献类型：
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作者：
Yu Sun;D. P. Potasek;S. N. Fry;B. Nelson
本文报道了一种适用于体微加工的微机械力传感器，该传感器采用差动三片式梳状驱动结构。利用SOI晶片上的DRIE的高产率制造工艺来构造高深宽比器件。该传感器具有灵敏度高、线性好、带宽大等特点，是研究果蝇飞行行为所必需的。首次真实的实时捕捉到果蝇的气动力和惯性力，为了解果蝇的飞行行为提供了宝贵的数据。
This paper reports a MEMS micro force sensor with a novel configuration of differential tri-plate comb drives suitable for bulk micromachining. A high-yield fabrication process using DRIE on SOI wafers is utilized to construct the high aspect ratio devices. The sensor has a high sensitivity, good linearity, and a large bandwidth, which are required for characterizing flight behavior of fruit flies (Drosophila). For the first time, both aerodynamic and inertial forces of Drosophila were captured in real time, providing valuable data for understanding Drosophila's flight behavior.