Decomposition and polymerization of perfluorinated compounds in microwave-excited atmospheric pressure plasma
Decomposition and polymerization of perfluorinated compounds in microwave-excited atmospheric pressure plasma
复制标题
全氟化合物在微波激发常压等离子体中的分解和聚合
DOI：
10.1063/1.1931034
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发表时间：
2005
影响因子：
3.2
通讯作者：
T. Goto
中科院分区：
文献类型：
--
作者：
M. Nagai;M. Hori;T. Goto
采用常压等离子体和连续波微波激发，研究了全氟化合物气体的分解和聚合反应。在520 K的低气体温度下产生了大气压等离子体。在等离子体下游区域设置直流偏压，在Si衬底上用CF_4和C_4F_8等离子体合成了直径约50-120 nm的球形粒子。等离子体中的气体温度对于产生粒子是重要的，因为在850 K的高气体温度下不会产生粒子。通过能量色散X射线光谱法确定颗粒由碳和氟原子组成。此外，还研究了H2添加对CF 4闪烁He等离子体的影响。CF 4的分解效率随着H2的加入而增加，并且在没有二氧化碳排放的情况下获得超过80%。
Decompositions and polymerizations of perfluorinated compounds gases were demonstrated employing atmospheric pressure plasmas with continuous-wave microwave excitations. The atmospheric pressure plasma was generated at a low gas temperature of 520 K. Spherical-shaped particles of approximately 50–120 nm in diameter were synthesized in CF4∕He and C4F8∕He plasma on Si substrate with dc voltage biasing, which was set in the plasma downstream region. The gas temperature in plasma was important to generate particles because particles were not generated at a high gas temperature of 850 K. The particles were determined to consist of carbon and fluorine atom composition from an energy dispersive x-ray spectroscopy. Furthermore, the effect of H2 addition on the CF4∕He plasma was investigated. The decomposition efficiency of CF4 was increased with H2 addition and obtained over 80% without emissions of carbon dioxide.