Free-Space Tunable and Drop Optical Filters Using Vertical Bragg Mirrors on Silicon
Free-Space Tunable and Drop Optical Filters Using Vertical Bragg Mirrors on Silicon
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DOI：
10.1109/jstqe.2006.884082
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发表时间：
2006-11
影响因子：
4.9
通讯作者：
B. Saadany;M. Malak;M. Kubota;F. Marty;Y. Mita;D. Khalil;T. Bourouina
中科院分区：
文献类型：
--
作者：
B. Saadany;M. Malak;M. Kubota;F. Marty;Y. Mita;D. Khalil;T. Bourouina
垂直布拉格栅镜是通过深反应离子刻蚀(DRIE)对硅进行各向异性刻蚀而实现的，从而在硅和空气之间产生多个垂直界面。利用布拉格反射镜实现了两种滤光片结构。第一种是由两个反射镜组成的可调谐Fabry-Peacurot腔，其中通过利用绝缘体上硅(SOI)静电微机械系统(MEMS)驱动移动其中一个反射镜来实现调谐。第二种是滤光器，倾斜的布拉格反射镜起到波长选择反射器的作用。介绍了一种混合了低温和博世DRIE工艺的增强型刻蚀工艺。给出了该器件的实现结构、制作工艺和测试性能。
Vertical Bragg grating mirrors are realized by the anisotropic etching of Si using deep reactive ion etching (DRIE), thus producing multiple vertical interfaces between Si and air. The Bragg mirrors are used to realize two optical filter configurations. The first is a tunable Fabry-Peacuterot cavity composed of two mirrors, where tuning is achieved by moving one of the mirrors using silicon-on-insulator (SOI) electrostatic microelectromechanical system (MEMS) actuation. The second is a drop filter, where a tilted Bragg mirror acts as a wavelength selective reflector. The enhanced etching process involving a mix of cryogenic and Bosch DRIE processes is presented. The realized structures, fabrication process, as well as measured performance are also presented