Swelling and modification of silicone surface by F2 laser irradiation
Swelling and modification of silicone surface by F2 laser irradiation
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DOI：
10.1007/s00339-004-2850-4
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发表时间：
2004-09-01
影响因子：
2.7
通讯作者：
Inoue, N
中科院分区：
文献类型：
--
作者：
Takao, H;Okoshi, M;Inoue, N
硅橡胶的表面溶胀和改性的157-nm的F-2激光照射在激光能量密度小于烧蚀阈值。照射表面膨胀到约3 μ m的高度。傅里叶变换红外（FT-IR）光谱和X射线光电子能谱表明，辐照表面改性二氧化硅。193-nm ArF激光照射的硅橡胶引起的表面溶胀，但不修改为SiO2。在红外光谱中观察到了有机硅端基的红外峰。从这些结果可以得出结论，有机硅的主链（Si-O）被光解离，低分子量有机硅的生成导致溶胀。此外，还观察到当每次激光束照射硅橡胶时，从硅橡胶中释放出甲烷和二氧化碳。这些气体是通过硅的侧链（Si-CH 3）的光解离产生的。在低于烧蚀阈值的激光能量密度下，F-2激光能有效地解离有机硅和O-2的Si-CH 3键和Si-O键，导致SiO2改性和溶胀。
The surface of silicone rubber swelled and was modified by 157-nm F-2 laser irradiation at a laser fluence less than the ablation threshold. The irradiated surface swelled to a height of approximately 3 mum. Fourier-transform infrared (FT-IR) spectroscopy and X-ray photoelectron spectroscopy showed that the irradiated surface was modified to SiO2. 193-nm ArF laser irradiation of the silicone rubber induced the surface to swell, but not to modify to SiO2. The IR peaks of end groups of silicone were observed in the FT-IR spectra of the surface. From these results, it is concluded that the main chains (Si-O) of silicone were photodissociated and generation of low molecular weight silicones caused the swelling. In addition, it was observed that methane and carbon dioxide were released from silicone rubber when each laser beam irradiated it. These gases were generated by photodissociation of the side chains (Si-CH3) of silicone. An F-2 laser beam can photodissociate the Si-CH3 bonds and the Si-O bonds of silicone and O-2 effectively even at a laser fluence less than the ablation threshold, resulting in the modification to SiO2 and the swelling.