SOME SURFACE-PROPERTIES OF PLASMA POLYMERS PREPARED FROM HEXAMETHYLDISILAZANE AND DIETHYLAMINOTRIMETHYLSILANE
SOME SURFACE-PROPERTIES OF PLASMA POLYMERS PREPARED FROM HEXAMETHYLDISILAZANE AND DIETHYLAMINOTRIMETHYLSILANE
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DOI：
10.1002/app.1979.070240903
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发表时间：
1979-01-01
影响因子：
3
通讯作者：
HIROTSU, T
中科院分区：
文献类型：
--
作者：
HIROTSU, T
采用13.56MHz射频等离子体技术制备了硅胺等离子体聚合物，并对聚合物的表面性质进行了研究。该聚合物被揭示为疏水的等离子体聚合物从四甲基硅烷，它不含氮。疏水性在沉积在载玻片上的这些聚合物层的约50 μ m厚度下变得有效。这些聚合物随着老化逐渐变得相对亲水。润湿性的变化可能是由于这些表面层氧化形成更亲水的氧化物和过氧化物。甲硅烷基胺等离子体聚合物的疏水特性可以通过这些聚合物中缺乏胺和/或酰胺来解释，如用ATR-IR和ESCA光谱所观察到的。这些光谱观测还表明，氮是一个更脆弱的元素在等离子体中比碳或硅的甲硅烷基胺。
Plasma polymers from some silyl amines were produced by the radio frequency of 13.56 MHz, and the surface properties were investigated. The polymers were revealed to be as hydrophobic as a plasma polymer from tetramethylsilane, which does not contain nitrogen. The hydrophobicity became effective at around 50 Å thicknesses of these polymer layers deposited on micro‐slide glass. These polymers have gradually become comparatively hydrophilic with the aging. The change of wettability is probably due to the oxidation of these surface layers to form oxides and peroxides, which are more hydrophilic. The hydrophobic character of silyl amine plasma polymers could be explained by the lack of amines and/or amides in these polymers, as observed with ATR‐IR and ESCA spectra. These spectroscopic observations also suggest that nitrogen is a more fragile element in plasma than carbon or silicon in the silyl amines.