Scalable hollow nanoneedle array using stepper lithography for parallel intracellular delivery
Scalable hollow nanoneedle array using stepper lithography for parallel intracellular delivery
复制标题
使用步进光刻的可扩展空心纳米针阵列进行并行细胞内递送
DOI：
10.1016/j.precisioneng.2018.10.014
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
Shibata Takayuki
中科院分区：
文献类型：
--
作者：
Nagai Moeto;Miyamoto Tokuma;Hizawa Takeshi;Shibata Takayuki
纳米针细胞内给药是一种将不同类型的材料注入单个细胞的通用方法。单个中空针限制了细胞递送的吞吐量。这项研究旨在开发一种适合大规模并行输送和大规模生产的中空纳米针阵列。用步进光刻技术制造中空纳米针结构看起来很有希望，但制造方法尚不清楚。我们用I线步进光刻技术制作了纳米针尖的图案化，并制作了中空的纳米针阵列。我们使用了硅和绝缘体上的硅晶片，并建立了控制针径、高度和节距的工艺。在正面形成针尖，在背面形成导入通道。一种荧光DNA溶液通过组装的纳米针阵列通过电动喷射被传输。
Intracellular delivery with a nanoneedle is a versatile method of injecting various types of materials into a single cell. A single hollow needle limits the throughput of cellular delivery. This study aims to develop an array of hollow nanoneedles suitable for massively parallel delivery and mass production. The fabrication of hollow nanoneedle structures by stepper lithography looks promising, but a method for the fabrication has remained unclear. We patterned the tips of nanoneedles by i-line stepper lithography and fabricated a hollow nanoneedle array. We used silicon and silicon-on-insulator wafers and established a process for controlling needle diameter, height, and pitch. Needle tips were produced on the front side and introduction channels were formed on the backside. A fluorescent DNA solution was transported by electrokinetic ejection through a fabricated nanoneedle array.