Evaluation of Image Distortion in Sem by Using a Dot-Array Based Certified Reference Material.
Evaluation of Image Distortion in Sem by Using a Dot-Array Based Certified Reference Material.
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使用基于点阵的认证参考材料评估扫描电镜中的图像失真。
DOI：
10.1093/jmicro/dfab003
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发表时间：
2021
期刊：
影响因子：
1.8
通讯作者：
A. Kurokawa
中科院分区：
文献类型：
--
作者：
K. Kumagai;A. Kurokawa
本文提出了一种快速、直接的方法，使用经过认证的参考材料 (CRM) 作为测试样本来评估扫描电子显微镜 (SEM) 中的图像失真。 CRM具有方形点阵结构，其点距具有认可值。通过图像分析计算 CRM 的每个点之间的距离，我们可以检测图像中点间距变化的失真情况。此外，通过考虑认证值的不确定性，可以定量评估图像失真的显着性。该方法使我们能够轻松估计图像畸变的不确定性，从而提高扫描电镜测量的可靠性。
This paper presents a quick and straightforward method to evaluate image distortion in scanning electron microscopy (SEM) using a certified reference material (CRM) as a test specimen. The CRM has a square dot-array structure, whose dot-pitch has an accredited value. By calculating the distance between each dot of the CRM via image analysis, we can detect the distortion in the image as variations of dot interval. Furthermore, by considering the uncertainty of the certified value, it is possible to quantitatively evaluate the significance of the distortion in the image. This method enables us to easily estimate the uncertainty from image distortion, which can improve the reliability of measurement by SEM.