Fundamental insight on developing low dielectric constant polyimides
Fundamental insight on developing low dielectric constant polyimides
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DOI：
10.1016/s0040-6090(97)00481-1
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发表时间：
1997-10-31
期刊：
影响因子：
2.1
通讯作者：
St Clair, AK
中科院分区：
文献类型：
--
作者：
Simpson, JO;St Clair, AK
热稳定、耐用、绝缘的聚酰亚胺在微电子器件的制造中有很大的需求。本文研究了几种芳香族聚酰亚胺的介电和光学性能。研究了极化率、氟含量和自由体积对介电常数的影响。在一般情况下，最小化极化率，最大化的自由体积，并最终降低聚酰亚胺的介电常数研究。出版社：Elsevier Science S.A.
Thermally stable, durable, insulative polyimides are in great demand for the fabrication of microelectronic devices. In this investigation dielectric and optical properties have been studied for several series of aromatic polyimides. The effect of polarizability, fluorine content, and free volume on dielectric constant was examined. In general, minimizing polarizability, maximizing free volume and fluorination all lowered dielectric constants in the polyimides studied. Published by Elsevier Science S.A.