Silicon erasable waveguides and directional couplers by germanium ion implantation for configurable photonic circuits
Silicon erasable waveguides and directional couplers by germanium ion implantation for configurable photonic circuits
复制标题
DOI：
10.1364/oe.394871
复制
发表时间：
2020-06-08
期刊：
影响因子：
3.8
通讯作者：
Reed, Graham T.
中科院分区：
文献类型：
--
作者：
Chen, Xia;Milosevic, Milan M.;Reed, Graham T.
提出了一种实现可配置/一次性可编程（OTP）硅光子电路的新技术。一旦所提出的光子电路被编程，其信号路由就被保留，而不需要额外的功耗。该技术可以潜在地实现针对一系列不同应用和性能要求的光子芯片的多用途设计，因为它可以在芯片制造之后针对每个特定应用进行编程。因此，由于生产量的增加，每个芯片的生产成本可以降低，并且能够实现新的光子电路的快速原型制作。可配置电路的可擦除定向耦合器（DC）的形式的基本构建模块的设计和制造，使用离子注入波导。我们展示了永久切换的光信号之间的下降端口和通过端口的DC使用本地化的制造后的激光退火过程。以通用1x 4和2x2可编程开关电路形式的原理证明演示器被制造并随后编程。由The Optical Society根据Creative Commons Attribution 4.0 License条款发布。
A novel technique for realization of configurable/one-time programmable (OTP) silicon photonic circuits is presented. Once the proposed photonic circuit is programmed, its signal routing is retained without the need for additional power consumption. This technology can potentially enable a multi-purpose design of photonic chips for a range of different applications and performance requirements, as it can be programmed for each specific application after chip fabrication. Therefore, the production costs per chip can be reduced because of the increase in production volume, and rapid prototyping of new photonic circuits is enabled. Essential building blocks for the configurable circuits in the form of erasable directional couplers (DCs) were designed and fabricated, using ion implanted waveguides. We demonstrate permanent switching of optical signals between the drop port and through the port of the DCs using a localized post-fabrication laser annealing process. Proof-of-principle demonstrators in the form of generic 1x4 and 2x2 programmable switching circuits were fabricated and subsequently programmed. Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License.