Fabrication of InGaN/GaN Nanodisk Structure by using Bio-template and Neutral Beam Etching Process
Fabrication of InGaN/GaN Nanodisk Structure by using Bio-template and Neutral Beam Etching Process
复制标题
采用生物模板和中性束刻蚀工艺制备InGaN/GaN纳米盘结构
DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
and S. Samukawa
中科院分区:
文献类型:
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作者:
Y. C. Lai;A. Higo;C. Lee;C. Thomas;T. Tanikawa;K. Shojiki;S. Kuboya;R. Katayama;T. Kiba;P. Yu;I. Yamashita;A. Murayama;and S. Samukawa