Design of Planar Si Thermoelectric Generators with Phononic Crystal Patterning
Design of Planar Si Thermoelectric Generators with Phononic Crystal Patterning
复制标题
具有声子晶体图案化的平面硅热电发电机的设计
DOI：
10.18494/sam.2019.2297
复制
发表时间：
2019
影响因子：
1.2
通讯作者：
O. Paul
中科院分区：
文献类型：
--
作者：
M. Nomura;R. Yanagisawa;P. Zimmermann;P. Ruther;O. Paul
本文介绍了用于能量收集应用的平面多晶硅热电发电机（TEG）的设计和优化。利用从测试结构通过实验获得的材料参数，通过有限元方法模拟温度和电势分布，以评估热电发电机的性能。对具有无图案薄膜或具有声子晶体（PnC）纳米结构薄膜的热电发电机进行了研究，以评估纳米图案化对功率密度的提高。通过具有较大孔洞的声子晶体纳米图案化，功率密度得以提高，并且由于较高的热阻，最佳桥长减小。一系列模拟表明，纳米图案化在较小的桥长下使功率密度提高了2.5倍，并且从机械强度的角度来看也是有利的。
This paper presents the design and optimization of planar poly-Si thermoelectric generators (TEGs) for energy harvesting application. Temperature and electric potential distributions are simulated using material parameters, which were experimentally obtained from test structures, by the finite element method to evaluate the performance of TEGs. TEGs with unpatterned membranes or membranes with phononic crystal (PnC) nanostructures are investigated to evaluate the increase in power density by nanopatterning. The power density is increased by PnC nanopatterning with larger holes and the optimal bridge length decreases owing to a higher thermal resistance. The series of simulations shows that nanopatterning increases the power density 2.5 times at a smaller bridge length and is also advantageous from the viewpoint of mechanical strength.