Development and characterization of a microthermoelectric generator with plated copper/constantan thermocouples
Development and characterization of a microthermoelectric generator with plated copper/constantan thermocouples
复制标题
镀铜/康铜热电偶微型热电发电机的开发和表征
DOI：
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发表时间：
2013
期刊：
影响因子：
--
通讯作者：
L. Lorenzelli
中科院分区：
文献类型：
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作者：
S. Pelegrini;A. Adami;C. Collini;P. Conci;C. D. Araujo;V. Guarnieri;S. Güths;A. A. Pasa;L. Lorenzelli
本文报道了一种基于平面技术的微型热电发电机（μTEG）的开发和表征，该发电机使用电化学沉积的康铜热电偶和铜热电偶，在微加工的硅衬底上使用SiO2/Si 3 N4/SiO2隔热膜来产生热梯度。通过有限元模拟对μTEG进行了设计和优化，以利用硅和膜的不同热导率，从而在热电偶的热端和冷端之间的平坦表面上获得最大温差。温差取决于施加到装置上部的氮气（N2）流速。在180个热电偶、内阻为3 kΩ、N2流速为6 m/s的条件下，所制备的热电发生器的最大输出电压和功率分别为118 mV/cm 2和1.1 μW/cm 2。最大效率（性能）为2 × 10−3 μW/cm 2 K2。
This work reports the development and the characterization of a microthermoelectric generator (μTEG) based on planar technology using electrochemically deposited constantan and copper thermocouples on a micro machined silicon substrate with a SiO2/Si3N4/SiO2 thermally insulating membrane to create a thermal gradient. The μTEG has been designed and optimized by finite element simulation in order to exploit the different thermal conductivity of silicon and membrane in order to obtain the maximum temperature difference on the planar surface between the hot and cold junctions of the thermocouples. The temperature difference was dependent on the nitrogen (N2) flow velocity applied to the upper part of the device. The fabricated thermoelectric generator presented maximum output voltage and power of 118 mV/cm2 and of 1.1 μW/cm2, respectively, for a device with 180 thermocouples, 3 kΩ of internal resistance, and under a N2 flow velocity of 6 m/s. The maximum efficiency (performance) was 2 × 10−3 μW/cm2 K2.
影响因子：
4.6
作者：
Huesgen, Till;Woias, Peter;Kockmann, Norbert
通讯作者：
Kockmann, Norbert