Dielectrophoretic assembly of carbon nanofiber nanoelectromechanical devices
Dielectrophoretic assembly of carbon nanofiber nanoelectromechanical devices
复制标题
碳纳米纤维纳米机电器件的介电泳组装
DOI：
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发表时间：
2005
影响因子：
2.4
通讯作者：
Y. Gogotsi
中科院分区：
文献类型：
--
作者：
S. Evoy;M. Riegelman;N. Naguib;Haihui Ye;P. Jaroenapibal;D. Luzzi;Y. Gogotsi
We report a technique for the assembly of bottom-up nanomechanical devices. This technique employs the dielectrophoretic manipulation of nanostructures within a multiple layer lithography process. Mechanical resonators were specifically produced by assembling and clamping tubular carbon fibers onto prefabricated pads. Our preliminary results showed that an assembled cantilevered fiber with length L=5 /spl mu/m and width of W=180 nm possessed a resonant frequency of f=1.17 MHz. A shorter L=3-/spl mu/m-long singly clamped resonator of similar width showed a resonance of f=3.12 MHz. This frequency range is in agreement with the low gigapascal bending moduli previously reported for carbon structures showing extensive volume defects. This technology would allow the integration of bottom-up nanostructures with other more established fabrication processes, thus allowing the deployment of engineered nanodevices in integrated systems.
