Enhanced hardness in sputtered Zr–Ni–N films
Enhanced hardness in sputtered Zr–Ni–N films
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DOI：
10.1016/j.surfcoat.2005.11.042
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发表时间：
2006-06
影响因子：
5.4
通讯作者：
J. Šůna;J. Musil;Václav Ondok;Jeung-Whan Han
中科院分区：
文献类型：
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作者：
J. Šůna;J. Musil;Václav Ondok;Jeung-Whan Han
近年来研究发现，在反应磁控溅射TiN薄膜中加入少量（≤ 10at. %）当溅射气体中的氮分压pN2连续增加时，Fe的量使得可以改变膜中晶粒的优选结晶取向。在具有不同择优取向的薄膜之间存在一个过渡区（TR）。TR内产生的膜的特征在于由X射线无定形结构。尽管在TR内部和其外部产生的膜在其结构上有很大不同，但两种膜都表现出增强的硬度[J.Musil，H. Polakova，J. Suna，J. Vlcek，Surf.外套177 - 178（2004）289]。发现在两种情况下出现增强的硬度：（1）在由不同结晶取向的小晶粒的混合物组成的材料中，即在TR内部产生的膜中，以及（2）在由垂直于膜/基底界面的纳米柱组成的材料中，即在TR外部产生的膜中。这些发现与基于晶粒尺寸和微晶形状具有增强硬度的纳米复合相的新概念一致[J.Musil，in：A.卡瓦列里，J.T.M. De Hosson（Eds.），Nanostructured Hard Coatings，Kluwer Academic/Plenum Publishers，纽约，2005，第10章]。本文还详细讨论了Zr-Ni-N薄膜的力学性能随pN2的增加而变化的规律。
Recently, it was found that the reactive magnetron sputtering of TiN films with the addition of small (≤10 at.%) amount of Fe makes it possible to change the preferred crystallographic orientation of grains in the film when the partial pressure of nitrogen pN2in the sputtering gas is continuously increased. Between the films with different preferred crystallographic orientations there is a transition region (TR). The films produced inside TR are characterized by an X-ray amorphous structure. In spite of the fact that the films produced inside TR and outside of it strongly differ in their structure, both kinds of films exhibit an enhanced hardness [J. Musil, H. Polakova, J. Suna, J. Vlcek, Surf. Coat. Technol. 177–178 (2004) 289]. It was found that the enhanced hardness arises in two cases: (1) in the materials composed of a mixture of small grains of different crystallographic orientations, i.e. in the films produced inside TR, and (2) in the materials composed of nanocolumns perpendicular to the film/substrate interface, i.e. in the films produced outside TR. These findings are in an agreement with a new concept of nanocomposite phases with enhanced hardness based on the size of grains and the shape of crystallites [J. Musil, in: A. Cavaleiro, J.T.M. De Hosson (Eds.), Nanostructured Hard Coatings, Kluwer Academic/Plenum Publishers, New York, 2005, Chapter 10]. A development of mechanical properties of the Zr–Ni–N films with increasing pN2is also discussed in detail.