Large-scale 2D Surface-Micromachined Optical Ultrasound Transducer (SMOUT) array for 3D computed tomography
Large-scale 2D Surface-Micromachined Optical Ultrasound Transducer (SMOUT) array for 3D computed tomography
复制标题
用于 3D 计算机断层扫描的大型 2D 表面微机械光学超声换能器 (SMOUT) 阵列
DOI：
10.1117/12.2649277
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发表时间：
2023
期刊：
影响因子：
--
通讯作者：
Zou, Jun
中科院分区：
文献类型：
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作者：
Yan, Zhiyu;Zou, Jun
本文报道了一种基于法布里-珀罗干涉测量法的由 350 × 350 元件组成的 2D 表面微机械光学超声换能器 (SMOUT) 阵列。 SMOUT 阵列的均匀性通过映射元件的光学性能来表征。 在 10 MHz 带宽上，元件的中心频率、声学带宽和噪声等效压力 (NEP) 分别确定为 3.5 MHz、5 MHz 和 20.7 Pa。基于SMOUT阵列的PACT被用来演示成像能力。凭借这些功能，SMOUT 阵列可以为实现高速 3D PACT 应用提供有前景的解决方案。
This paper reports a 2D surface-micromachined optical ultrasound transducer (SMOUT) array consisting of 350 × 350 elements based on Fabry-Perot interferometry. The uniformity of the SMOUT array is characterized by mapping the optical performance of the elements. The center frequency, acoustic bandwidth, and noise equivalent pressure (NEP) of the elements are determined to be 3.5 MHz, 5 MHz, and 20.7 Pa over a bandwidth of 10 MHz, respectively. PACT based on the SMOUT array is conducted to demonstrate the imaging capability. With these features, SMOUT array could provide a promising solution for achieving high-speed 3D PACT applications.