A polymer optical waveguide with out-of-plane branching mirrors for surface-normal optical interconnections
A polymer optical waveguide with out-of-plane branching mirrors for surface-normal optical interconnections
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DOI：
10.1109/50.971690
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发表时间：
2001-12-01
影响因子：
4.7
通讯作者：
Ito, H
中科院分区：
文献类型：
--
作者：
Kagami, M;Kawasaki, A;Ito, H
我们开发了一种使用温度控制反应离子蚀刻（RIE）的同时制造方法，用于包含由聚合物薄膜制成的多重面外分支镜的通道光波导。利用该方法，可以通过控制温度来局部调节刻蚀速率。该技术还可以在同一聚合物光波导上形成不同深度的沟槽。我们注意到，从扫描电子显微镜（SEM）观察，同时控制镜面倾斜角度和光滑的核心表面可以实现。具体来说，130-135度的热处理温度似乎是最佳的，以保持矩形横截面，并实现一个足够光滑的核心表面的聚甲基丙烯酸甲酯（PMMA）波导。尽管存在高δ波导（δ = 5.4%），但测量到的传播损耗很小。例如，分别在650 mn、850 nm和1.3 nm波长处测量到0.1、0.3和0.7 dB/cm的损耗。从远场模式（FFP）测量中，我们发现反射平面几乎是直线的，并且反射光可以被光电二极管有效地捕获。在工作温度测试中，我们发现在-25°c到+85°c的温度范围内，采用玻璃板夹层结构可以将耦合光的强度波动降低到1.5 dB以下。
We have developed a simultaneous fabrication method using temperature control reactive ion etching (RIE) for channel optical waveguides incorporating plural out-of-plane branching mirrors made from polymer film. By using this method, the etching rate can be adjusted locally by controlling the temperature. This technology also enables the formation of trenches of various depths on the same polymer optical waveguide. We noted from scanning electron microscope (SEM) observations that simultaneous control of the mirror tilt angle and a smooth core surface could be achieved. To be specific, a heat treatment temperature of 130-135 degreesC appears to be the optimum to maintain a rectangular cross section and to achieve a sufficiently smooth core surface for a polymethyl methacrylate (PMMA) waveguide. The measured propagation loss is small, in spite of the presence of a high-Delta waveguide (Delta = 5.4%). For example, losses of 0.1, 0.3, and 0.7 dB/cm are measured at wavelengths of 650 mn, 850 nm, and 1.3 mum, respectively. From far-field pattern (FFP) measurements, we found that the mirror plane was almost rectilinear, and that the reflected light can be captured efficiently by a photodiode. In operational temperature tests, we showed that intensity fluctuations of the coupling light can be reduced to less than 1.5 dB for the temperature range between -25 degreesC and +85 degreesC by adopting a sandwich structure with glass plates.