In-plane deformation measurement using the atomic force microscope moiré method
In-plane deformation measurement using the atomic force microscope moiré method
复制标题
DOI：
10.1088/0957-4484/11/1/305
复制
发表时间：
2000-03
期刊：
影响因子：
3.5
通讯作者：
H. Xie;S. Kishimoto;A. Asundi;C. G. Boay;N. Shinya;Jin Yu;B. Ngoi
中科院分区：
文献类型：
--
作者：
H. Xie;S. Kishimoto;A. Asundi;C. G. Boay;N. Shinya;Jin Yu;B. Ngoi
提出了一种新的利用原子力显微镜（AFM）测量云母面内形变的扫描云纹法。莫尔条纹是由原子力显微镜系统中CRT的扫描线与云母或高取向热解石墨（HOPG）的原子晶格形成的。详细介绍了光栅的测量原理和制作技术。用这种新方法测量了云母板在Nd-YAG激光辐照后的残余变形，并测定了HOPG在拉伸载荷下的残余应变。得到了一些有趣的结果。实验结果验证了以材料晶格为模型网格测量纳米级形变的可行性。
In this paper, a new scanning moiré method is developed to measure the in-plane deformation of mica using an atomic force microscope (AFM). Moiré patterns are formed by the scanning line of the CRT in the AFM system, and the atomic lattice of the mica or high-orientated pyrolytic graphite (HOPG). The measurement principle and the techniques employed for grating preparation are described in detail. This new method is used to measure the residual deformation of a mica plate after irradiation by a Nd-YAG laser, and to determine the residual strain of HOPG under a tensile load. Some interesting results are obtained. The successful results verify the feasibility of this method for measuring deformation in the nanometre range using the lattice of the material as the model grid.